X-ray investigations of MBE-grown heteroepitaxial SiC layers on 6H-SiC substrates: Fid-Bau Portal

X-ray investigations of MBE-grown heteroepitaxial SiC layers on 6H-SiC substrates

Bauer, A. / Krausslich, J. / Kocher, B. / Goetz, K. / Fissel, A. / Richter, W.

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X-ray investigations of MBE-grown heteroepitaxial SiC layers on 6H-SiC substrates

Bauer, A. / Krausslich, J. / Kocher, B. / Goetz, K. / Fissel, A. / Richter, W.

X-ray investigations of MBE-grown heteroepitaxial SiC layers on 6H-SiC substrates

Bauer, A. / Krausslich, J. / Kocher, B. / Goetz, K. / Fissel, A. / Richter, W.

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Document information

Title:

X-ray investigations of MBE-grown heteroepitaxial SiC layers on 6H-SiC substrates

Contributors:

Bauer, A. (author) / Krausslich, J. (author) / Kocher, B. (author) / Goetz, K. (author) / Fissel, A. (author) / Richter, W. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 179 - 182

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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