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Defect Characterization in P Isotype Si/SiGe/Si Heterostructures by Space Charge Spectroscopy
Defect Characterization in P Isotype Si/SiGe/Si Heterostructures by Space Charge Spectroscopy
Defect Characterization in P Isotype Si/SiGe/Si Heterostructures by Space Charge Spectroscopy
Bremond, G. (author) / Souifi, A. (author) / Degroodt, P. (author) / Warren, P. (author)
MATERIALS SCIENCE FORUM ; 495
1994-01-01
495 pages
Article (Journal)
Unknown
DDC:
620.11
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