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    Electron-beam-induced nitrogen migration through a nitrided silicon dioxide thin film

    New search for: Garcia, V.
    New search for: Glachant, A.
    New search for: Pantel, R.
    New search for: Straboni, A.

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    Electron-beam-induced nitrogen migration through a nitrided silicon dioxide thin film

    New search for: Garcia, V.
    New search for: Glachant, A.
    New search for: Pantel, R.
    New search for: Straboni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electron-beam-induced nitrogen migration through a nitrided silicon dioxide thin film

    New search for: Garcia, V.
    New search for: Glachant, A.
    New search for: Pantel, R.
    New search for: Straboni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Electron-beam-induced nitrogen migration through a nitrided silicon dioxide thin film

    Contributors:

    Garcia, V. (author) / Glachant, A. (author) / Pantel, R. (author) / Straboni, A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 74 ; 165

    Publication date:

    1994-01-01

    Size:

    165 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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