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    Passivation of GaAs surface by atomic-layer-deposited titanium nitride

    New search for: Bosund, M.
    New search for: Aierken, A.
    New search for: Tiilikainen, J.
    New search for: Hakkarainen, T.
    New search for: Lipsanen, H.

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    Passivation of GaAs surface by atomic-layer-deposited titanium nitride

    New search for: Bosund, M.
    New search for: Aierken, A.
    New search for: Tiilikainen, J.
    New search for: Hakkarainen, T.
    New search for: Lipsanen, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Passivation of GaAs surface by atomic-layer-deposited titanium nitride

    New search for: Bosund, M.
    New search for: Aierken, A.
    New search for: Tiilikainen, J.
    New search for: Hakkarainen, T.
    New search for: Lipsanen, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Passivation of GaAs surface by atomic-layer-deposited titanium nitride

    Contributors:

    Bosund, M. (author) / Aierken, A. (author) / Tiilikainen, J. (author) / Hakkarainen, T. (author) / Lipsanen, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 5385-5389

    Publication date:

    2008-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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