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Photoinitiation effect during photo-induced deposition of aluminum films using dimethylaluminum hydride

Kawai, T. / Okawa, M. / Komatsu, A. / Shimada, T.

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Photoinitiation effect during photo-induced deposition of aluminum films using dimethylaluminum hydride

Kawai, T. / Okawa, M. / Komatsu, A. / Shimada, T.

Photoinitiation effect during photo-induced deposition of aluminum films using dimethylaluminum hydride

Kawai, T. / Okawa, M. / Komatsu, A. / Shimada, T.

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Order at Subito €

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Document information

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Document information

Title:

Photoinitiation effect during photo-induced deposition of aluminum films using dimethylaluminum hydride

Contributors:

Kawai, T. (author) / Okawa, M. (author) / Komatsu, A. (author) / Shimada, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 79/80 ; 385

Publication date:

1994-01-01

Size:

385 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

Okawa, M. / Tsuruta, H. / Hanabusa, M. | British Library Online Contents | 1994

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