Local equilibrium phase diagrams: SiC deposition in a hot wall LPCVD reactor: Fid-Bau Portal

Local equilibrium phase diagrams: SiC deposition in a hot wall LPCVD reactor

Chiu, C. C. / Desu, S. B. / Chen, Z. J. / Ching Yi Tsai

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Local equilibrium phase diagrams: SiC deposition in a hot wall LPCVD reactor

Chiu, C. C. / Desu, S. B. / Chen, Z. J. / Ching Yi Tsai

Local equilibrium phase diagrams: SiC deposition in a hot wall LPCVD reactor

Chiu, C. C. / Desu, S. B. / Chen, Z. J. / Ching Yi Tsai

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Local equilibrium phase diagrams: SiC deposition in a hot wall LPCVD reactor

Contributors:

Chiu, C. C. (author) / Desu, S. B. (author) / Chen, Z. J. (author) / Ching Yi Tsai (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 9 ; 2066

Publication date:

1994-01-01

Size:

2066 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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