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Local equilibrium phase diagrams: SiC deposition in a hot wall LPCVD reactor
Local equilibrium phase diagrams: SiC deposition in a hot wall LPCVD reactor
Local equilibrium phase diagrams: SiC deposition in a hot wall LPCVD reactor
Chiu, C. C. (Autor:in) / Desu, S. B. (Autor:in) / Chen, Z. J. (Autor:in) / Ching Yi Tsai (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 9 ; 2066
01.01.1994
2066 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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