Numerical study of gasdynamics influence on three-dimensional transport phenomena in vertical zinc selenide LPCVD reactor

Garibin, E. A. / Mironov, I. A. / Khoruzhnikov, S. E. et al. | British Library Online Contents | 1996

Local equilibrium phase diagrams: SiC deposition in a hot wall LPCVD reactor

Chiu, C. C. / Desu, S. B. / Chen, Z. J. et al. | British Library Online Contents | 1994

Low electrical resistivity polycrystalline SiGe films obtained by vertical LPCVD for MOS devices

Teixeira, R. C. / Doi, I. / Zakia, M. B. et al. | British Library Online Contents | 2005

Homoepitaxial Growth of 4H- and 6H-SiC in a Commercial Horizontal LPCVD Reactor

Wischmeyer, F. / Leidich, D. / Niemann, E. | British Library Online Contents | 1998

Development of Vertical 3''x2'' LPCVD System for Fast Epitaxial Growth on 4H-SiC

Zhao, W.S. / Sun, G.S. / Wu, H.L. et al. | British Library Online Contents | 2012