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A platform for research: civil engineering, architecture and urbanism
High resolution dry etching of III-V semiconductor materials using magnetically enhanced discharges
High resolution dry etching of III-V semiconductor materials using magnetically enhanced discharges
High resolution dry etching of III-V semiconductor materials using magnetically enhanced discharges
Pearton, S. J. (author)
1994-01-01
61 pages
Article (Journal)
Unknown
DDC:
620.11
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