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Formation of porosity in sputtered amorphous hydrogenated carbon films

Yin, Y. / Collins, R. E. / Zhang, Q.-C.

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Formation of porosity in sputtered amorphous hydrogenated carbon films

Yin, Y. / Collins, R. E. / Zhang, Q.-C.

Formation of porosity in sputtered amorphous hydrogenated carbon films

Yin, Y. / Collins, R. E. / Zhang, Q.-C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Formation of porosity in sputtered amorphous hydrogenated carbon films

Contributors:

Yin, Y. (author) / Collins, R. E. (author) / Zhang, Q.-C. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 29 ; 5794

Publication date:

1994-01-01

Size:

5794 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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