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Carbon incorporation mechanism in atomic layer epitaxy of GaAs and AlGaAs

Kobayashi, N. / Makimoto, T.

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Carbon incorporation mechanism in atomic layer epitaxy of GaAs and AlGaAs

Kobayashi, N. / Makimoto, T.

Carbon incorporation mechanism in atomic layer epitaxy of GaAs and AlGaAs

Kobayashi, N. / Makimoto, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Carbon incorporation mechanism in atomic layer epitaxy of GaAs and AlGaAs

Contributors:

Kobayashi, N. (author) / Makimoto, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 82/83 ; 284

Publication date:

1994-01-01

Size:

284 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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