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Effects of active hydrogen on atomic layer epitaxy of GaAs

Meguro, T. / Isshiki, H. / Lee, J.-S. / Iwai, S. / Aoyagi, Y.

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Effects of active hydrogen on atomic layer epitaxy of GaAs

Meguro, T. / Isshiki, H. / Lee, J.-S. / Iwai, S. / Aoyagi, Y.

Effects of active hydrogen on atomic layer epitaxy of GaAs

Meguro, T. / Isshiki, H. / Lee, J.-S. / Iwai, S. / Aoyagi, Y.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effects of active hydrogen on atomic layer epitaxy of GaAs

Contributors:

Meguro, T. (author) / Isshiki, H. (author) / Lee, J.-S. (author) / Iwai, S. (author) / Aoyagi, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 112 ; 118-121

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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