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    Rutherford backscattering studies of solid phase recrystallization and incorporation in erbium-implanted silicon

    New search for: Li, D.-Q.
    New search for: Ren, T.-Q.
    New search for: Gong, B.-A.
    New search for: Zhang, B.

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    Rutherford backscattering studies of solid phase recrystallization and incorporation in erbium-implanted silicon

    New search for: Li, D.-Q.
    New search for: Ren, T.-Q.
    New search for: Gong, B.-A.
    New search for: Zhang, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Rutherford backscattering studies of solid phase recrystallization and incorporation in erbium-implanted silicon

    New search for: Li, D.-Q.
    New search for: Ren, T.-Q.
    New search for: Gong, B.-A.
    New search for: Zhang, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Rutherford backscattering studies of solid phase recrystallization and incorporation in erbium-implanted silicon

    Contributors:

    Li, D.-Q. (author) / Ren, T.-Q. (author) / Gong, B.-A. (author) / Zhang, B. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 30 ; L1

    Publication date:

    1995-01-01

    Size:

    L1

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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