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    In Situ Ellipsometry in Microelectronics

    New search for: Irene, E. A.
    New search for: Woollam, J. A.
    New search for: Auciello, O.
    New search for: Krauss, A. R.

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    In Situ Ellipsometry in Microelectronics

    New search for: Irene, E. A.
    New search for: Woollam, J. A.
    New search for: Auciello, O.
    New search for: Krauss, A. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    In Situ Ellipsometry in Microelectronics

    New search for: Irene, E. A.
    New search for: Woollam, J. A.
    New search for: Auciello, O.
    New search for: Krauss, A. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    In Situ Ellipsometry in Microelectronics

    Contributors:

    Irene, E. A. (author) / Woollam, J. A. (author) / Auciello, O. / Krauss, A. R.

    Published in:

    In Situ, Real-Time Characterization of Thin-Film Growth Processes ; 24

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 20

    Publication date:

    1995-01-01

    Size:

    24 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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