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Silicon Wafer Bonding via Designed Monolayers

Steinkirchner, J. / Martini, T. / Reiche, M. / Kaestner, G.

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Silicon Wafer Bonding via Designed Monolayers

Steinkirchner, J. / Martini, T. / Reiche, M. / Kaestner, G.

Silicon Wafer Bonding via Designed Monolayers

Steinkirchner, J. / Martini, T. / Reiche, M. / Kaestner, G.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Silicon Wafer Bonding via Designed Monolayers

Contributors:

Steinkirchner, J. (author) / Martini, T. (author) / Reiche, M. (author) / Kaestner, G. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH- ; 7 ; 662

Publication date:

1995-01-01

Size:

662 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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