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Molecular dynamics modelling of silicon wafer bonding

Scheerschmidt, K. / Conrad, D. / Belov, A. / Goesele, U.

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Molecular dynamics modelling of silicon wafer bonding

Scheerschmidt, K. / Conrad, D. / Belov, A. / Goesele, U.

Molecular dynamics modelling of silicon wafer bonding

Scheerschmidt, K. / Conrad, D. / Belov, A. / Goesele, U.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Molecular dynamics modelling of silicon wafer bonding

Contributors:

Scheerschmidt, K. (author) / Conrad, D. (author) / Belov, A. (author) / Goesele, U. (author)

Published in:

COMPUTATIONAL MATERIALS SCIENCE ; 9 ; 108-115

Publication date:

1997-01-01

Size:

8 pages

ISSN:

0927-0256

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 510

Steinkirchner, J. / Martini, T. / Reiche, M. et al. | British Library Online Contents | 1995

Tight-binding-based empirical potentials: Molecular dynamics of wafer bonding

Scheerschmidt, K. / Conrad, D. / Wang, Y. | British Library Online Contents | 2001

Enhanced semi-empirical potentials in molecular dynamics simulations of wafer bonding

Scheerschmidt, K. / Conrad, D. / Belov, A. et al. | British Library Online Contents | 2000

Dislocation Networks Formed by Silicon Wafer Direct Bonding

Reiche, M. | British Library Online Contents | 2008

Structural and electrical investigations of silicon wafer bonding interfaces

Benamara, M. / Rocher, A. / Sopena, P. et al. | British Library Online Contents | 1996