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    Structural and electrical investigations of silicon wafer bonding interfaces

    New search for: Benamara, M.
    New search for: Rocher, A.
    New search for: Sopena, P.
    New search for: Claverie, A.
    New search for: Laporte, A.
    New search for: Sarrabayrouse, G.
    New search for: Lescouzeres, L.
    New search for: Peyre-Lavigne, A.
    New search for: Balkanski, M.
    New search for: Kamimura, H.
    New search for: Mahajan, S.

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    Structural and electrical investigations of silicon wafer bonding interfaces

    New search for: Benamara, M.
    New search for: Rocher, A.
    New search for: Sopena, P.
    New search for: Claverie, A.
    New search for: Laporte, A.
    New search for: Sarrabayrouse, G.
    New search for: Lescouzeres, L.
    New search for: Peyre-Lavigne, A.
    New search for: Balkanski, M.
    New search for: Kamimura, H.
    New search for: Mahajan, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structural and electrical investigations of silicon wafer bonding interfaces

    New search for: Benamara, M.
    New search for: Rocher, A.
    New search for: Sopena, P.
    New search for: Claverie, A.
    New search for: Laporte, A.
    New search for: Sarrabayrouse, G.
    New search for: Lescouzeres, L.
    New search for: Peyre-Lavigne, A.
    New search for: Balkanski, M.
    New search for: Kamimura, H.
    New search for: Mahajan, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Structural and electrical investigations of silicon wafer bonding interfaces

    Contributors:

    Benamara, M. (author) / Rocher, A. (author) / Sopena, P. (author) / Claverie, A. (author) / Laporte, A. (author) / Sarrabayrouse, G. (author) / Lescouzeres, L. (author) / Peyre-Lavigne, A. (author) / Balkanski, M. / Kamimura, H.

    Published in:

    Solid-State Materials for Advanced Technology ; 164-167

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 42

    Publication date:

    1996-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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