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A platform for research: civil engineering, architecture and urbanism
Range profiles of 6-10 MeV ^1^5N ions implanted in silicon
Range profiles of 6-10 MeV ^1^5N ions implanted in silicon
Range profiles of 6-10 MeV ^1^5N ions implanted in silicon
Ahlgren, T. (author) / Vaekevaeinen, K. (author) / Raeisaenen, J. (author) / Rauhala, E. (author) / Keinonen, J. (author)
APPLIED SURFACE SCIENCE ; 90 ; 419-423
1995-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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