Range Distributions of Implanted Ions in Silicon Carbide: Fid-Bau Portal

Range Distributions of Implanted Ions in Silicon Carbide

Janson, M. S. / Linnarsson, M. K. / Hallen, A. / Svensson, B. G.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Range Distributions of Implanted Ions in Silicon Carbide

Janson, M. S. / Linnarsson, M. K. / Hallen, A. / Svensson, B. G.

Range Distributions of Implanted Ions in Silicon Carbide

Janson, M. S. / Linnarsson, M. K. / Hallen, A. / Svensson, B. G.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Range Distributions of Implanted Ions in Silicon Carbide

Contributors:

Janson, M. S. (author) / Linnarsson, M. K. (author) / Hallen, A. (author) / Svensson, B. G. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 779-782

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Qin, X.F. / Li, S. / Wang, F.X. et al. | British Library Online Contents | 2011

Oxidation of ion implanted silicon carbide

Makhtari, A. / Raineri, V. / La Via, F. et al. | British Library Online Contents | 2001

The Range Distribution of Er Ions Implanted in Silicon Crystal

Qin, X.F. / Liang, Y. / Wang, F.X. | British Library Online Contents | 2011

Defect annealing in ion implanted silicon carbide

Calcagno, L. / Grimaldi, M. G. / Musumeci, P. | British Library Online Contents | 1997

Stoichiometric Disturbances in Ion Implanted Silicon Carbide

Morvan, E. / Monserrat, J. / Rebollo, J. et al. | British Library Online Contents | 1998