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    Diffusion profiles of low dosages chromium ions implanted into (100) crystalline silicon

    New search for: Salman, F.
    New search for: Zhang, P.
    New search for: Chow, L.
    New search for: Stevie, F. A.

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    Diffusion profiles of low dosages chromium ions implanted into (100) crystalline silicon

    New search for: Salman, F.
    New search for: Zhang, P.
    New search for: Chow, L.
    New search for: Stevie, F. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Diffusion profiles of low dosages chromium ions implanted into (100) crystalline silicon

    New search for: Salman, F.
    New search for: Zhang, P.
    New search for: Chow, L.
    New search for: Stevie, F. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Diffusion profiles of low dosages chromium ions implanted into (100) crystalline silicon

    Contributors:

    Salman, F. (author) / Zhang, P. (author) / Chow, L. (author) / Stevie, F. A. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 62-65

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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