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    Raman Image Study of Defects in Ion-implanted and Post-Annealed Silicon

    New search for: Mizoguchi, K.
    New search for: Nakashima, S.
    New search for: Harima, H.
    New search for: Hara, T.

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    Raman Image Study of Defects in Ion-implanted and Post-Annealed Silicon

    New search for: Mizoguchi, K.
    New search for: Nakashima, S.
    New search for: Harima, H.
    New search for: Hara, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Raman Image Study of Defects in Ion-implanted and Post-Annealed Silicon

    New search for: Mizoguchi, K.
    New search for: Nakashima, S.
    New search for: Harima, H.
    New search for: Hara, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Raman Image Study of Defects in Ion-implanted and Post-Annealed Silicon

    Contributors:

    Mizoguchi, K. (author) / Nakashima, S. (author) / Harima, H. (author) / Hara, T. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 1547-1552

    Publication date:

    1995-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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