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Structural Defects Formed in Al-Implanted and Annealed 4H-SiC
Structural Defects Formed in Al-Implanted and Annealed 4H-SiC
Structural Defects Formed in Al-Implanted and Annealed 4H-SiC
Jones, K. A. (author) / Zheleva, T. S. (author) / Kulkarni, V. N. (author) / Ervin, M. H. (author) / Derenge, M. A. (author) / Vispute, R. D. (author)
MATERIALS SCIENCE FORUM ; 457/460 ; 889-892
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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