GISAXS study of defects in He implanted silicon: Fid-Bau Portal

GISAXS study of defects in He implanted silicon

Dubcek, P. / Milat, O. / Pivac, B. / Bernstorff, S. / Amenitsch, H. / Tonini, R. / Corni, F. / Ottaviani, G.

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GISAXS study of defects in He implanted silicon

Dubcek, P. / Milat, O. / Pivac, B. / Bernstorff, S. / Amenitsch, H. / Tonini, R. / Corni, F. / Ottaviani, G.

GISAXS study of defects in He implanted silicon

Dubcek, P. / Milat, O. / Pivac, B. / Bernstorff, S. / Amenitsch, H. / Tonini, R. / Corni, F. / Ottaviani, G.

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Document information

Title:

GISAXS study of defects in He implanted silicon

Contributors:

Dubcek, P. (author) / Milat, O. (author) / Pivac, B. (author) / Bernstorff, S. (author) / Amenitsch, H. (author) / Tonini, R. (author) / Corni, F. (author) / Ottaviani, G. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 71 ; 82 - 86

Publication date:

2000-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Bernstorff, S. / Dubcek, P. / Pivac, B. et al. | British Library Online Contents | 2006

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