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    Review of the Influence of Micro Crystal Defects in Silicon Single Crystals on Gate Oxide Integrity

    New search for: Fusegawa, I.
    New search for: Takano, K.
    New search for: Kimura, M.
    New search for: Fujimaki, N.

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    Review of the Influence of Micro Crystal Defects in Silicon Single Crystals on Gate Oxide Integrity

    New search for: Fusegawa, I.
    New search for: Takano, K.
    New search for: Kimura, M.
    New search for: Fujimaki, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Review of the Influence of Micro Crystal Defects in Silicon Single Crystals on Gate Oxide Integrity

    New search for: Fusegawa, I.
    New search for: Takano, K.
    New search for: Kimura, M.
    New search for: Fujimaki, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Review of the Influence of Micro Crystal Defects in Silicon Single Crystals on Gate Oxide Integrity

    Contributors:

    Fusegawa, I. (author) / Takano, K. (author) / Kimura, M. (author) / Fujimaki, N. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 1683-1690

    Publication date:

    1995-01-01

    Size:

    8 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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