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Gaseous Etching for Characterization of Structural Defects in Silicon Carbide Single Crystals
Gaseous Etching for Characterization of Structural Defects in Silicon Carbide Single Crystals
Gaseous Etching for Characterization of Structural Defects in Silicon Carbide Single Crystals
Powell, J. A. (author) / Larkin, D. J. (author) / Trunek, A. J. (author) / Pensl, G. / Morkoc, H. / Monemar, B. / Janzen, E.
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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