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    Subsurface Damage in Single Diamond Tool Machined Si Wafers

    New search for: McHedlidze, T. R.
    New search for: Yonenaga, I.
    New search for: Sumino, K.

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    Subsurface Damage in Single Diamond Tool Machined Si Wafers

    New search for: McHedlidze, T. R.
    New search for: Yonenaga, I.
    New search for: Sumino, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Subsurface Damage in Single Diamond Tool Machined Si Wafers

    New search for: McHedlidze, T. R.
    New search for: Yonenaga, I.
    New search for: Sumino, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Subsurface Damage in Single Diamond Tool Machined Si Wafers

    Contributors:

    McHedlidze, T. R. (author) / Yonenaga, I. (author) / Sumino, K. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 1841-1846

    Publication date:

    1995-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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