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Effect of wear of diamond wire on surface morphology, roughness and subsurface damage of silicon wafers
Effect of wear of diamond wire on surface morphology, roughness and subsurface damage of silicon wafers
Effect of wear of diamond wire on surface morphology, roughness and subsurface damage of silicon wafers
Kumar, Arkadeep (author) / Kaminski, Steffi (author) / Melkote, Shreyes N. (author) / Arcona, Chris (author)
Wear = ; 364/365 ; 163-168
2016-01-01
6 pages
Article (Journal)
English
DDC:
621.89
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