Morphology of Oxide Precipitates in Czochralski Silicon Crystals: Fid-Bau Portal

Morphology of Oxide Precipitates in Czochralski Silicon Crystals

Sueoka, K. / Ikeda, N. / Yamamoto, T. / Kobayashi, S.

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Morphology of Oxide Precipitates in Czochralski Silicon Crystals

Sueoka, K. / Ikeda, N. / Yamamoto, T. / Kobayashi, S.

Morphology of Oxide Precipitates in Czochralski Silicon Crystals

Sueoka, K. / Ikeda, N. / Yamamoto, T. / Kobayashi, S.

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Order at Subito €

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Document information

Title:

Morphology of Oxide Precipitates in Czochralski Silicon Crystals

Contributors:

Sueoka, K. (author) / Ikeda, N. (author) / Yamamoto, T. (author) / Kobayashi, S. (author) / Taguchi, T.

Published in:

Shallow Impurities in Semiconductors ; 523

MATERIALS SCIENCE FORUM

Publication date:

1993-01-01

Size:

523 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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