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Local Structure Analysis Around Arsenic Implanted Into Silicon By XAFS Technique
Local Structure Analysis Around Arsenic Implanted Into Silicon By XAFS Technique
Local Structure Analysis Around Arsenic Implanted Into Silicon By XAFS Technique
Horii, Y. (author) / Kikuchi, Y. (author) / Kase, M. (author) / Komiya, S. (author)
MATERIALS SCIENCE FORUM ; 1887-1890
1995-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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