Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon: Fid-Bau Portal

Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon

Akane, T. / Mastumoto, S. / Mizushima, I.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon

Akane, T. / Mastumoto, S. / Mizushima, I.

Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon

Akane, T. / Mastumoto, S. / Mizushima, I.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon

Contributors:

Akane, T. (author) / Mastumoto, S. (author) / Mizushima, I. (author) / Taguchi, T.

Published in:

Shallow Impurities in Semiconductors ; 237

MATERIALS SCIENCE FORUM

Publication date:

1993-01-01

Size:

237 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

Hishida, Y. / Watanabe, M. / Nakashima, K. et al. | British Library Online Contents | 2000

Excimer laser annealing of B and BF2 implanted Si

Monakhov, E. V. / Svensson, B. G. / Linnarsson, M. K. et al. | British Library Online Contents | 2005

Low-Temperature Activation of Ion-Implanted Dopants in 4H-SiC by Excimer Laser Annealing

Tanaka, Y. / Tanoue, H. / Arai, K. | British Library Online Contents | 2002

Laser annealing of Al implanted silicon carbide: Structural and optical characterization

Boutopoulos, C. / Terzis, P. / Zergioti, I. et al. | British Library Online Contents | 2007

Single shot excimer laser annealing of amorphous silicon for AMLCD

Boher, P. / Stehle, J. L. / Stehle, M. et al. | British Library Online Contents | 1996