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A parametric study of titanium silicide formation by rapid thermal processing
A parametric study of titanium silicide formation by rapid thermal processing
A parametric study of titanium silicide formation by rapid thermal processing
Amorsolo, A. V. (Autor:in) / Funkenbusch, P. D. (Autor:in) / Kadin, A. M. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 412-421
01.01.1996
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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