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Copper diffusion in TaN-based thin layers

Nazon, J. / Fraisse, B. / Sarradin, J. / Fries, S. G. / Tedenac, J. C. / Frety, N.

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Copper diffusion in TaN-based thin layers

Nazon, J. / Fraisse, B. / Sarradin, J. / Fries, S. G. / Tedenac, J. C. / Frety, N.

Copper diffusion in TaN-based thin layers

Nazon, J. / Fraisse, B. / Sarradin, J. / Fries, S. G. / Tedenac, J. C. / Frety, N.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Copper diffusion in TaN-based thin layers

Contributors:

Nazon, J. (author) / Fraisse, B. (author) / Sarradin, J. (author) / Fries, S. G. (author) / Tedenac, J. C. (author) / Frety, N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 5670-5674

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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