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    Redistribution of arsenic in silicon during thermal oxidation

    New search for: Choi, Seong Soo

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    Redistribution of arsenic in silicon during thermal oxidation

    New search for: Choi, Seong Soo

    Access

    Access via TIB
    Check availability in my library

    Redistribution of arsenic in silicon during thermal oxidation

    New search for: Choi, Seong Soo

    Access

    Access via TIB
    Check availability in my library

    Access

    Access via TIB
    Check availability in my library

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Redistribution of arsenic in silicon during thermal oxidation

    Contributors:

    Choi, Seong Soo (author)

    Publication date:

    1987

    Size:

    Mfiche

    Remarks:

    Chapel Hill, Univ.of North Carolina, Ph.D.Thesis 1987
    Digital preservation by Technische Informationsbibliothek (TIB) / Leibniz-Informationszentrum Technik und Naturwissenschaften und Universitätsbibliothek

    Type of media:

    Book

    Type of material:

    Print

    Language:

    Unknown

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