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    Atmospheric pressure chemical vapor deposition of TiN from tetrakis(dimethylamido)titanium and ammonia

    New search for: Musher, J. N.
    New search for: Gordon, R. G.

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    Atmospheric pressure chemical vapor deposition of TiN from tetrakis(dimethylamido)titanium and ammonia

    New search for: Musher, J. N.
    New search for: Gordon, R. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Atmospheric pressure chemical vapor deposition of TiN from tetrakis(dimethylamido)titanium and ammonia

    New search for: Musher, J. N.
    New search for: Gordon, R. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Atmospheric pressure chemical vapor deposition of TiN from tetrakis(dimethylamido)titanium and ammonia

    Contributors:

    Musher, J. N. (author) / Gordon, R. G. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 989-1001

    Publication date:

    1996-01-01

    Size:

    13 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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