Direct observations of heteroepitaxial diamond on a silicon(110) substrate by microwave plasma chemical vapor deposition: Fid-Bau Portal

Direct observations of heteroepitaxial diamond on a silicon(110) substrate by microwave plasma chemical vapor deposition

Chen, C. J. / Chang, L. / Lin, T. S. / Chen, F. R.

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Direct observations of heteroepitaxial diamond on a silicon(110) substrate by microwave plasma chemical vapor deposition

Chen, C. J. / Chang, L. / Lin, T. S. / Chen, F. R.

Direct observations of heteroepitaxial diamond on a silicon(110) substrate by microwave plasma chemical vapor deposition

Chen, C. J. / Chang, L. / Lin, T. S. / Chen, F. R.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Direct observations of heteroepitaxial diamond on a silicon(110) substrate by microwave plasma chemical vapor deposition

Contributors:

Chen, C. J. (author) / Chang, L. (author) / Lin, T. S. (author) / Chen, F. R. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 1002-1010

Publication date:

1996-01-01

Size:

9 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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