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    Precursor development for the chemical vapor deposition of aluminium, copper and palladium

    New search for: Graefe, A.
    New search for: Heinen, R.
    New search for: Klein, F.
    New search for: Kruck, T.
    New search for: Scherer, M.
    New search for: Schober, M.
    New search for: Gessner, T
    New search for: Schulz, S. E.

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    Precursor development for the chemical vapor deposition of aluminium, copper and palladium

    New search for: Graefe, A.
    New search for: Heinen, R.
    New search for: Klein, F.
    New search for: Kruck, T.
    New search for: Scherer, M.
    New search for: Schober, M.
    New search for: Gessner, T
    New search for: Schulz, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Precursor development for the chemical vapor deposition of aluminium, copper and palladium

    New search for: Graefe, A.
    New search for: Heinen, R.
    New search for: Klein, F.
    New search for: Kruck, T.
    New search for: Scherer, M.
    New search for: Schober, M.
    New search for: Gessner, T
    New search for: Schulz, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Precursor development for the chemical vapor deposition of aluminium, copper and palladium

    Contributors:

    Graefe, A. (author) / Heinen, R. (author) / Klein, F. (author) / Kruck, T. (author) / Scherer, M. (author) / Schober, M. (author) / Gessner, T / Schulz, S. E.

    Published in:

    Materials for Advanced Metallization ; 187-191

    APPLIED SURFACE SCIENCE ; 91

    Publication date:

    1996-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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