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    Ti-diffusion barrier in Cu-based metallization

    New search for: Braud, F.
    New search for: Torres, J.
    New search for: Palleau, J.
    New search for: Mermet, J. L.
    New search for: Mouche, M. J.
    New search for: Gessner, T
    New search for: Schulz, S. E.

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    Ti-diffusion barrier in Cu-based metallization

    New search for: Braud, F.
    New search for: Torres, J.
    New search for: Palleau, J.
    New search for: Mermet, J. L.
    New search for: Mouche, M. J.
    New search for: Gessner, T
    New search for: Schulz, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ti-diffusion barrier in Cu-based metallization

    New search for: Braud, F.
    New search for: Torres, J.
    New search for: Palleau, J.
    New search for: Mermet, J. L.
    New search for: Mouche, M. J.
    New search for: Gessner, T
    New search for: Schulz, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Ti-diffusion barrier in Cu-based metallization

    Contributors:

    Braud, F. (author) / Torres, J. (author) / Palleau, J. (author) / Mermet, J. L. (author) / Mouche, M. J. (author) / Gessner, T / Schulz, S. E.

    Published in:

    Materials for Advanced Metallization ; 251-256

    APPLIED SURFACE SCIENCE ; 91

    Publication date:

    1996-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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