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    Ti nitride phases in thin films deposited by DC magnetron sputtering

    New search for: Manalia, R.
    New search for: Biro, D.
    New search for: Barna, P. B.
    New search for: Adamik, M.
    New search for: Zavaliche, F.
    New search for: Craciun, S.
    New search for: Devenyi, A.
    New search for: Gessner, T.
    New search for: Schulz, S. E.

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    Ti nitride phases in thin films deposited by DC magnetron sputtering

    New search for: Manalia, R.
    New search for: Biro, D.
    New search for: Barna, P. B.
    New search for: Adamik, M.
    New search for: Zavaliche, F.
    New search for: Craciun, S.
    New search for: Devenyi, A.
    New search for: Gessner, T.
    New search for: Schulz, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ti nitride phases in thin films deposited by DC magnetron sputtering

    New search for: Manalia, R.
    New search for: Biro, D.
    New search for: Barna, P. B.
    New search for: Adamik, M.
    New search for: Zavaliche, F.
    New search for: Craciun, S.
    New search for: Devenyi, A.
    New search for: Gessner, T.
    New search for: Schulz, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Ti nitride phases in thin films deposited by DC magnetron sputtering

    Contributors:

    Manalia, R. (author) / Biro, D. (author) / Barna, P. B. (author) / Adamik, M. (author) / Zavaliche, F. (author) / Craciun, S. (author) / Devenyi, A. (author) / Gessner, T. / Schulz, S. E.

    Published in:

    Materials for Advanced Metallization ; 295-302

    APPLIED SURFACE SCIENCE ; 91

    Publication date:

    1996-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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