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High ion density dry etching of compound semiconductors

Pearton, S. J.

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High ion density dry etching of compound semiconductors

Pearton, S. J.

High ion density dry etching of compound semiconductors

Pearton, S. J.

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Document information

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Title:

High ion density dry etching of compound semiconductors

Contributors:

Pearton, S. J. (author) / Balkanski, M. / Kamimura, H. / Mahajan, S.

Published in:

Solid-State Materials for Advanced Technology ; 101-118

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 40

Publication date:

1996-01-01

Size:

18 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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