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A platform for research: civil engineering, architecture and urbanism
Titanium carbide etching in high density plasma
Titanium carbide etching in high density plasma
Titanium carbide etching in high density plasma
Hsiao, R. (author) / Miller, D. (author) / Nguyen, S. (author) / Kellock, A. (author)
APPLIED SURFACE SCIENCE ; 148 ; 1-8
1999-01-01
8 pages
Article (Journal)
English
DDC:
621.35
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