Thermal stability of W~1~-~xS~x/Si multilayer reflective coatings under high intensity excimer laser pulses: Fid-Bau Portal

Thermal stability of W~1~-~xS~x/Si multilayer reflective coatings under high intensity excimer laser pulses

D'Anna, E. / Luches, A. / Martino, M. / Brunel, M. / Majkova, E. / Luby, S. / Senderak, R. / Jergel, M. / Hamelmann, F. / Kleineberg, U.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Thermal stability of W~1~-~xS~x/Si multilayer reflective coatings under high intensity excimer laser pulses

D'Anna, E. / Luches, A. / Martino, M. / Brunel, M. / Majkova, E. / Luby, S. / Senderak, R. / Jergel, M. / Hamelmann, F. / Kleineberg, U.

Thermal stability of W~1~-~xS~x/Si multilayer reflective coatings under high intensity excimer laser pulses

D'Anna, E. / Luches, A. / Martino, M. / Brunel, M. / Majkova, E. / Luby, S. / Senderak, R. / Jergel, M. / Hamelmann, F. / Kleineberg, U.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Thermal stability of W~1~-~xS~x/Si multilayer reflective coatings under high intensity excimer laser pulses

Contributors:

D'Anna, E. (author) / Luches, A. (author) / Martino, M. (author) / Brunel, M. (author) / Majkova, E. (author) / Luby, S. (author) / Senderak, R. (author) / Jergel, M. (author) / Hamelmann, F. (author) / Kleineberg, U. (author)

Published in:

APPLIED SURFACE SCIENCE ; 106 ; 166-170

Publication date:

1996-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Majkova, E. / Luby, S. / Anopchenko, A. et al. | British Library Online Contents | 1999

High-intensity KrF excimer laser processing of metal surfaces

Montagne, J. E. / Sarnet, T. / Prat, C. et al. | British Library Online Contents | 1993

Excimer laser synthesis of thin AlN coatings

Boulmer-Leborgne, C. / Thomann, A. L. / Andreazza, P. et al. | British Library Online Contents | 1998

Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

Flury, M. / Benatmane, A. / Gerard, P. et al. | British Library Online Contents | 2003

Laser-induced damage morphology of high-reflective optical coatings

He, H. B. / Hu, H. Y. / Tang, Z. P. et al. | British Library Online Contents | 2005