Thermal behaviour of Co/Si/W/Si multilayers under high intensity excimer laser pulses: Fid-Bau Portal

Thermal behaviour of Co/Si/W/Si multilayers under high intensity excimer laser pulses

Majkova, E. / Luby, S. / Anopchenko, A. / Jergel, M. / Luches, A. / Martino, M. / Mengucci, P. / Majni, G.

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Thermal behaviour of Co/Si/W/Si multilayers under high intensity excimer laser pulses

Majkova, E. / Luby, S. / Anopchenko, A. / Jergel, M. / Luches, A. / Martino, M. / Mengucci, P. / Majni, G.

Thermal behaviour of Co/Si/W/Si multilayers under high intensity excimer laser pulses

Majkova, E. / Luby, S. / Anopchenko, A. / Jergel, M. / Luches, A. / Martino, M. / Mengucci, P. / Majni, G.

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Document information

Title:

Thermal behaviour of Co/Si/W/Si multilayers under high intensity excimer laser pulses

Contributors:

Majkova, E. (author) / Luby, S. (author) / Anopchenko, A. (author) / Jergel, M. (author) / Luches, A. (author) / Martino, M. (author) / Mengucci, P. (author) / Majni, G. (author) / Boyd, I. W. / Perriere, J.

Published in:

Proceedings of Symposium G on Surface Processing: Laser, Lamp, Plasma of the 1998 E-MRS Spring Conference - Strasbourg, France, June 16-1998 ; 477-481

APPLIED SURFACE SCIENCE ; 138/139

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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