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    Photoelectron spectroscopy study of amorphous silicon-carbon alloys deposited by plasma-enhanced chemical vapor deposition

    New search for: Cicala, G.
    New search for: Bruno, G.
    New search for: Capezzuto, P.
    New search for: Favia, P.

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    Photoelectron spectroscopy study of amorphous silicon-carbon alloys deposited by plasma-enhanced chemical vapor deposition

    New search for: Cicala, G.
    New search for: Bruno, G.
    New search for: Capezzuto, P.
    New search for: Favia, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Photoelectron spectroscopy study of amorphous silicon-carbon alloys deposited by plasma-enhanced chemical vapor deposition

    New search for: Cicala, G.
    New search for: Bruno, G.
    New search for: Capezzuto, P.
    New search for: Favia, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Photoelectron spectroscopy study of amorphous silicon-carbon alloys deposited by plasma-enhanced chemical vapor deposition

    Contributors:

    Cicala, G. (author) / Bruno, G. (author) / Capezzuto, P. (author) / Favia, P. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 3017-3023

    Publication date:

    1996-01-01

    Size:

    7 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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