Laser Doping and Recrystallization for Amorphous Silicon Films by Plasma-Enhanced Chemical Vapor Deposition: Fid-Bau Portal

Laser Doping and Recrystallization for Amorphous Silicon Films by Plasma-Enhanced Chemical Vapor Deposition

Wuu, D. S. / Lien, S. Y. / Wang, J. H. / Mao, H. Y. / Hsieh, I. C. / Wu, B. R. / Yao, P. C.

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Laser Doping and Recrystallization for Amorphous Silicon Films by Plasma-Enhanced Chemical Vapor Deposition

Wuu, D. S. / Lien, S. Y. / Wang, J. H. / Mao, H. Y. / Hsieh, I. C. / Wu, B. R. / Yao, P. C.

Laser Doping and Recrystallization for Amorphous Silicon Films by Plasma-Enhanced Chemical Vapor Deposition

Wuu, D. S. / Lien, S. Y. / Wang, J. H. / Mao, H. Y. / Hsieh, I. C. / Wu, B. R. / Yao, P. C.

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Document information

Title:

Laser Doping and Recrystallization for Amorphous Silicon Films by Plasma-Enhanced Chemical Vapor Deposition

Contributors:

Wuu, D. S. (author) / Lien, S. Y. (author) / Wang, J. H. (author) / Mao, H. Y. (author) / Hsieh, I. C. (author) / Wu, B. R. (author) / Yao, P. C. (author)

Published in:

MATERIALS SCIENCE FORUM ; 475/479 ; 3791-3794

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Photoelectron spectroscopy study of amorphous silicon-carbon alloys deposited by plasma-enhanced chemical vapor deposition

Cicala, G. / Bruno, G. / Capezzuto, P. et al. | British Library Online Contents | 1996

Plasma-enhanced chemical vapor deposition of PbTiO3 thin films

Tong, M. / Dai, G. / Gao, D. | British Library Online Contents | 2000

Rapid thermal recrystallization of amorphous silicon films

Beshkov, G. D. / Dimitrov, D. B. / Lazarova, V. et al. | British Library Online Contents | 1997