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LBIC investigation of impurity-dislocation interaction in FZ silicon wafers

Perichaud, I. / Simon, J. J. / Martinuzzi, S.

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LBIC investigation of impurity-dislocation interaction in FZ silicon wafers

Perichaud, I. / Simon, J. J. / Martinuzzi, S.

LBIC investigation of impurity-dislocation interaction in FZ silicon wafers

Perichaud, I. / Simon, J. J. / Martinuzzi, S.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

LBIC investigation of impurity-dislocation interaction in FZ silicon wafers

Contributors:

Perichaud, I. (author) / Simon, J. J. (author) / Martinuzzi, S. (author) / Balkanski, M. / Kamimura, H. / Mahajan, S.

Published in:

Solid-State Materials for Advanced Technology ; 265-269

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 42

Publication date:

1996-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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