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Minority carrier lifetime and metallic-impurity mapping in silicon wafers

Palais, O. / Martinuzzi, S. / Simon, J. J.

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Minority carrier lifetime and metallic-impurity mapping in silicon wafers

Palais, O. / Martinuzzi, S. / Simon, J. J.

Minority carrier lifetime and metallic-impurity mapping in silicon wafers

Palais, O. / Martinuzzi, S. / Simon, J. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Minority carrier lifetime and metallic-impurity mapping in silicon wafers

Contributors:

Palais, O. (author) / Martinuzzi, S. (author) / Simon, J. J. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 27-29

Publication date:

2001-01-01

Size:

3 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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