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Via Hole Formation in Silicon Carbide by Laser Micromachining
Via Hole Formation in Silicon Carbide by Laser Micromachining
Via Hole Formation in Silicon Carbide by Laser Micromachining
Zekentes, K. (author) / Zergioti, I. (author) / Klini, A. (author) / Constantinidis, G. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
Silicon Carbide and Related Materials - 2005 ; 1119-1122
MATERIALS SCIENCE FORUM ; 527/529
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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