Fast etching and metallization of via-holes in sapphire with the help of radiation by a copper vapor laser: Fid-Bau Portal

Fast etching and metallization of via-holes in sapphire with the help of radiation by a copper vapor laser

Dolgaev, S. I. / Lyalin, A. A. / Simakin, A. V. / Voronov, V. V. / Shafeev, G. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Fast etching and metallization of via-holes in sapphire with the help of radiation by a copper vapor laser

Dolgaev, S. I. / Lyalin, A. A. / Simakin, A. V. / Voronov, V. V. / Shafeev, G. A.

Fast etching and metallization of via-holes in sapphire with the help of radiation by a copper vapor laser

Dolgaev, S. I. / Lyalin, A. A. / Simakin, A. V. / Voronov, V. V. / Shafeev, G. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Fast etching and metallization of via-holes in sapphire with the help of radiation by a copper vapor laser

Contributors:

Dolgaev, S. I. (author) / Lyalin, A. A. (author) / Simakin, A. V. (author) / Voronov, V. V. (author) / Shafeev, G. A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 109/110 ; 201-205

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Dolgaev, S. I. / Lyalin, A. A. / Simakin, A. V. et al. | British Library Online Contents | 1996

Laser-induced fast etching and metallization of SiC ceramics

Dolgaev, S. I. / Voronov, V. V. / Shafeev, G. A. et al. | British Library Online Contents | 1997

Chemical Vapor Deposition of Copper for Multilevel Metallization

Kaloyeros, A. E. / Fury, M. A. | British Library Online Contents | 1993

Study of Metallization of PCB Holes

Wu, X.-h. / Chen, B. / Pan, J. | British Library Online Contents | 2006

Patterning of copper for multilevel metallization: reactive ion etching and chemical-mechanical polishing

Steinbruechel, C. | British Library Online Contents | 1996