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Epitaxial growth of SiGe thin films by ion-beam sputtering
Epitaxial growth of SiGe thin films by ion-beam sputtering
Epitaxial growth of SiGe thin films by ion-beam sputtering
Sasaki, K. (author) / Nakata, K. (author) / Hata, T. (author)
APPLIED SURFACE SCIENCE ; 113/114 ; 43-47
1997-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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