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Selected-area deposition of diamond films on SiN/Si surfaces with microwave plasma enhanced CVD

Chen, Y.-H. / Hu, C.-T. / Lin, I.-N.

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Selected-area deposition of diamond films on SiN/Si surfaces with microwave plasma enhanced CVD

Chen, Y.-H. / Hu, C.-T. / Lin, I.-N.

Selected-area deposition of diamond films on SiN/Si surfaces with microwave plasma enhanced CVD

Chen, Y.-H. / Hu, C.-T. / Lin, I.-N.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Selected-area deposition of diamond films on SiN/Si surfaces with microwave plasma enhanced CVD

Contributors:

Chen, Y.-H. (author) / Hu, C.-T. (author) / Lin, I.-N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 113/114 ; 231-237

Publication date:

1997-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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